silicon wafer cleaning with cf/sub 4//h/sub 2/ plasma and its effect on the properties of dry thermally grown oxide

in the present study, a dry cleaning method for silicon wafers has been evaluated using cf/sub 4//50 percent h/sub 2/ plasma followed by exposure to o/sub 2/ and h/sub 2/ plasmas separately the effect of the cleaning process and the exposure to these plasmas on the interface trap level density, fixed oxide charge density, and flat band vo..

gasb-oxide removal and surface passivation using an electron cyclotron resonance hydrogen source

the authors describe the use of a low-temperature technique, which is based on h atoms from a microwave electron cyclotron resonance (ecr) h/sub 2/ plasma, to remove surface oxides and carbon from a single-crystal gasb surface. the experiments indicate that oxide removal occurs at a temperature of approximately 250 degrees c, much lower t..

an investigation of xecl laser ablation of polyetheretherketone (peek)-carbon fiber composite

the xecl laser ablation of a polyetheretherketone (peek)-carbon fiber composite (apc-2) is reported. etch rates and measurements of the ablation products have been carried out, together with scanning electron microscope evaluation of the etch craters. selective removal of the peek matrix occurs for fluences approximately 70-400 mj cm/sup ..

surface modification of kevlar fiber by a combination of plasma treatment and coupling agent treatment for silicone rubber composite

to improve the adhesion between poly(p-phenylene terephthalamide), ppta, fiber and silicone rubber, the surface modification of ppta was investigated. combining plasma treatment and coupling agent treatment with the silicone adhesive was found to be effective in improving adhesion. the combination process made the pull-out force of the pp..

protection of inp epi-ready wafers by controlled oxide growth

the quality of thermally cleaned inp (100) surfaces and that of gainas and inp layers subsequently grown by molecular beam epitaxy (mbe) are analyzed to assess the potential of two epi-ready oxidation procedures. gainas/inp structures were fabricated using a multichamber integrated uhv system combining a mbe reactor and a vws surface anal..

third international conference. indium phosphide and related materials (cat. no.91ch2950-4)

the following topics are dealt with' bulk growth and wafer technology: solar cells: epitaxy: optoelectronics: multiple quantum well lasers: hbts and higfets: dry etching techniques: device fabrication techniques: electron devices and bulk crystal growth: hemts: optoelectronic integrated circuits: fets: epitaxial processing: multiple quant..

characterization of interfacial bond strength by dynamic analysis

short beam shear, double cantilever beam, and torsional dynamic mechanical (dma) tests were performed on composite materials systems to characterize the interfacial bond strength. the composite materials were unidirectional flat laminates with different fiber surface treatments and sizings. the results indicated that the dma test was supe..

reinforcement of recycled polyolefins with wood fibers

in this work recycled polyolefins from municipal solid wastes, composed of 95 percent polyethylene (pe) and 5 percent polypropylene (pp), are reinforced with chemicothermomechanical pulp fiber, and the resulting material is formed by compression and injection molding. tensile properties are presented as function of fiber concentration, fi..

surface mount international, conference and exposition proceedings of the technical program

the following topics were dealt with' tape automated bonding: multichip modules: hi-density packaging: low volume manufacturing: soldering materials and processes: fine pitch technology: innovative assembly methods, manufacturing equipment: environmental alternative studies: cleanliness measurements in evaluating alternatives: fluxes and ..

fabrication and characterization of enfet devices for biomedical applications and environmental monitoring

the authors have realized an enzyme-modified fet device (enfet) in which the enzyme has been chemically linked to the fet surface by means of a layer of polymerized (3-(2-aminoethyl)aminopropyl)trimethoxysilane (aeaps). the enzyme has been bound to the amino functional groups of the polysiloxane surface together with bovine serum albumin ..