development of a thermal micro-biosensor fabricated on a silicon chip

in order to develop a sensitive, versatile and inexpensive portable instrument, a calorimetric micro-biosensor was designed and fabricated by etching part of the flow system into a silicon wafer the utility of the device was tested using the enzymes, catalase and penicillinase. this sensor showed good reproducibility and linearity up to 1..

amperometric polypyrrole enzyme electrodes' effect of permeability and enzyme location

potentiostatically and galvanostatically fabricated polypyrrole/glucose oxidase electrodes show a significant sieve effect concerning charge and size of the diffusing compound. the permeability decreases in the order h/sub 2/o/sub 2/>hydroquinone>ascorbic acid>fe(cn)/sub 6//sup 4-/. enzyme electrodes prepared in the galvanostatic mode are..

surface treatments by cw yag laser

the feasability of surface treatments by cw yag laser has been established. concerning solid phases treatment, the authors explored superficial quenching of grey cast iron. it brings out that it's not necessary to precast the sample before treatment, the natural absorptivity is sufficient. concerning liquid phase transformation two exampl..

silicon microlenses for enhanced optical coupling to silicon focal planes

the microlens array reported is for enhanced optical coupling of near ir photons into the edges of the rockwell solid-state photomultiplier (sspm). the edge-illumination is necessary to achieve the required quantum efficiency of near ir photons in the sspm, a device which is capable of photon counting. sspm detection requires a method of ..

nanostructure fabrication with the scanning tunneling microscope by tunneling medium manipulation

a polymer coating inserted between the tunneling tip and the graphite substrate has been found to improve the writing of nanostructure by short voltage pulses with the scanning tunneling microscope. structures ranging from 5 to 30 aa with up to 95 percent success rate were obtained. unlike previous reports, this structure fabrication proc..

a micromachining technique for a thin silicon membrane using merged epitaxial lateral overgrowth of silicon and sio/sub 2/ for an etch-stop

a micromachining technology using merged epitaxial lateral overgrowth (melo) of silicon, combined with sio/sub 2/ as an etch-stop, was developed. when epitaxial lateral overgrowth (elo) silicon merges on top of sio/sub 2/ islands, it forms a local silicon-on-insulator (soi) film which can be transformed into a thin silicon diaphragm neede..

control of residual stress of polysilicon thin films by heavy doping in surface micromachining

control of residual stress of polysilicon thin films for use in surface micromachining was experimentally studied. it was found that stress can be controlled by fairly heavy doping and subsequent annealing. polysilicon films with lower than 50 ppm tensile and -50 ppm compressive strain were fabricated as measured from micromachined test s..

application of dielectric isolation technology based on soot bonding

a soot bonding method has been developed that solves the economic and limited-diameter problems associated with the conventional dielectrically isolated substrate. in this method, the si-b-o soot particles used as adhesive agents are generated by essentially the same flame-hydrolysis technology used for fabricating optical waveguides. thi..

thin gate and analog capacitor dielectrics for submicron device fabrication

the miniaturization of devices in ulsi circuits are accompanied by shrinking vertical, as well as horizontal, device parameters such as junction depth, lateral impurity diffusion and film thicknesses. this is achieved by decoupling process steps, i.e processing at a reduced thermal budget. however, as device dimensions decrease, greater d..

micromechanics prediction of the shear strength of carbon fiber/epoxy matrix composites' the influence of the matrix and interface strengths

to improve bonding, various fiber surface treatments have been developed. these treatments are often evaluated by measuring their effect on a composite property sensitive to the interfacial bond strength (e.g. the composite shear strength). such methods are, however, inferential, and do not provide a direct measure of the strength of the ..