planarization technology and its application to multilayer devices

with a view to increasing the packing density of elements and improving the performance of lsi's drastically, great efforts are now being made to develop the fundamental technologies for three-dimensional ics. to realize these vertically stacked devices, planarization technology is indispensable because the surface steps seriously affect ..

thermal conductance of pressed brass contacts at liquid helium temperatures

an apparatus has been designed and fabricated which will measure the thermal conductance of pressed contacts at liquid helium temperatures as a function of applied force, with surface finish as a parameter. the apparatus is automated and was used to measure thermal conductance at temperatures from 1.5 to 6.5k at applied forces up to 700n ..

evaluation of the photovoltaic performance

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effect of surface condition on the strength of calorized boron fibers

metal deposition on boron fibers substantially changes the scale dependence of their strength. the structure of the fiber surfaces determines the character of their interaction with the matrix. during contact with liquid aluminum the reaction of b fibers is localized along intergranular grooves, whereas on b/b/sub 4/c fibers the reaction ..

products of interaction in contact of molten aluminum with boron fibers with a b/sub 4/c coating

on the boron fiber with a b/sub 4/c barrier coating-molten aluminum interface there are formed the products of their interaction, which are al/sub 4/c/sub 3/ aluminum carbide and alb/sub 2/ and alb/sub 12/ aluminum borides. the formation of the phases occurs as the result of solution of the coating material, which leads to failure of the ..

characterization of ti'linbo/sub 3/ deep waveguides diffused in dry and wet oxygen ambient

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influence of the surface treatment of zirconium-containing glass fibers on their alkali resistance

it has been shown that a polymer film of polyisobutylene does not protect glass fibers from alkaline attack. after treatment of the glass fibers with a 1-percent aqueous solution of beryllium acetate their surface does not decompose in an alkaline medium and no interaction is detected between the glass and the aggressive medium of hardeni..

process control for stabilising the gate oxide preparation

control measurements of mos-type capacitors by three methods are described to differentiate their breakdown voltages and their charge behaviour. the tests are based on current-voltage sensing as well as using hf and quasi-static monitoring of the c/v curves. the problem of chip preparation, including various methods of surface cleaning an..

glacial acetic acid stripper in semiconductor manufacturing process

described is a new method of stripping resist polymethylmethacrylate (pmma) from a glass mask used in semiconductor fabrication under room ambient conditions

characterisation of schottky diodes on gaas surfaces treated by reactive ion etching

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