surface structure studies of chromium-tin alloys fabricated by ion implantation and laser doping

ion implantation and laser doping are promising tools for the fabrication of films with specified physical, chemical, and mechanical properties on metal and alloy surfaces. in ion-implantation metallurgy, the doping atom is implanted directly into the matrix material to a depth of =0.01-0.1 mum. the structure of ion-doped alloys is determ..

adaptability of al-alloy ultrahigh-vacuum system of semiconductor fabrication

it is shown that an ultrahigh vacuum system consisting of aluminium alloy is a powerful tool for the fabrication of semiconductor devices. good characteristics of this system include short pumping time, lower baking temperature and low out-gassing rate, which are accomplished by an adequate surface treatment of the aluminium alloy

storage of hydrogen by high pressure microencapsulation in glass

the storage of compressed hydrogen gas in cylindrical glass microcapsules is a new concept that offers potential merits of lightweight, low cost, and simplicity in system design. the strongly temperature dependent permeability of candidate glass materials to hydrogen gas allows compressed hydrogen gas to be stored and retrieved from micro..

enzyme sensors

an enzyme sensor is composed of a molecule identifying region (or receptor) and a signal converting region (or transducer) which converts a change produced in the receptor into electrical signals enzymes are used for the molecule identifying region. the signal converting region is composed of electrochemical measuring devices (e.g. electr..

materials surface processing with excimer lasers

the continued reduction of vlsi circuit geometries together with increasingly higher levels of circuit integration create the demand for new circuit fabrication technologies. one of the limitations of current ic fabrication technology is the use of high temperature processing. high temperatures severely distort silicon wafers, causing los..

nitride, nitrided oxide and oxidized nitride for thin dielectrics

comparisons of material and electrical parameters between gate and interpoly dielectrics consisting of thermal oxides, nitrides, nitrided oxides and oxidized nitrides are reported. a range of dielectrics, 5 nm to 30 nm thick, are thermally grown using a matrix of oxidation cycles, ammonia concentration and nitridation temperatures and pre..

ion beam machining of micromechanical structures

the needs of high precision engineering currently call for dimensional tolerances of the order of 0.1 mu m and surface roughness of order 0.01 mu m, often in hard, brittle materials or materials of relatively poor machinability. the development of argon ion beam machining for milling, drilling and turning or lathing is reported as a means..

solid state biosensors using thin-film electrodes

solid-state technology was used to fabricate a new type of glucose sensor and a differential measurement system was incorporated with the sensor in order to suppress interfering signals. this glucose sensor was composed of film electrodes and an enzyme-immobilizing membrane. the hydrogen peroxide electrodes were fabricated by metallic fil..

the influence of test frequency on the fatigue resistance of a ni-base eutectic composite

the high cycle fatigue life of aged nitac 14b at 825 degrees c in vacuum is strongly dependent upon frequency and, at high frequencies, surface finish. crack initiation controls fatigue life at all frequencies, although the mechanism changes with frequency fiber cracking is especially prominent at low frequencies, as is dislocation penetr..

the physics and chemistry of thin 'native' oxide films on silicon

thin 'native' oxide films on silicon, resulting from various surface treatments or even exposure to room ambient, play a critical role in the fabrication of high performance, reliable vlsi semiconductor devices. the nature of these 0.5 to 2.0 nm films is discussed with respect to chemical, physical, and electrical properties. particular e..