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development of large area p-si surface barrier detectors and the associated charge sensitive preamplifier
large-area si surface barrier detectors (sdb), with 95 cm/sup 2/ sensitive area and a charge-sensitive preamplifier, for use up to 10/sup 5/-pf input capacitance were developed. the noise width of the preamplifier had a slope of 7 ev/pf with respect to the input capacitance. the p-si detectors were made of mcz si of 1.7-3.6-k omega resist..
plasma nitrided oxide films as a thin gate dielectric
in integrated circuit technology, the strong need for thin dielectrics that exhibit greater resistance to impurity diffusion and high electrical properties makes sio/sub 2/ nitridation very attractive. in this work, 10 and 15 nm thermally grown silicon dioxide films were nitrided in nh/sub 3/ at 950 degrees c for various times between 1 a..
unpinned gallium oxide/gaas interface by hydrogen and nitrogen surface plasma treatment
the fermi level at the ga oxide/gaas interface has been unpinned by rf plasma cleaning the gaas surface in h/sub 2/ and n/sub 2/. following plasma cleaning, a ga oxide film is reactively electron beam deposited onto the substrate metal-oxide-semiconductor (mos) capacitors fabricated on these structures show good high-frequency capacitance..
probe for laser angioplasty radiating a corolla shaped beam
laser angioplasty is a rapidly widening field. however, at present, the experimental research on human patients is limited by severe technical problems, particularly in the case of coronary arteries. the risk of mechanical or laser-induced perforations is likely the most serious. to get rid of this drawback a new fiber-optic probe is desc..
new high transparent resist and process technology for krf excimer laser lithography
novel, very simplified, high-aspect-ratio, single-layer resist materials and process technology for krf excimer laser lithography have been developed. they consist of a negative resist, a positive resist, and a surface treatment process called hard (high-aspect-ratio resist pattern fabrication by alkaline surface disposal). both the negat..
microfocused ion beam applications in microelectronics
finely focused ion beams with current densities on the order of one a/cm/sup 2/ with beam diameters as small as 0.1 mu m are used in a wide variety of surface processing applications in microelectronic research. some of the techniques include scanning ion microscopy and high spatial resolution sims, micromachining by physical sputtering, ..
characterization of silicon bipolar devices fabricated using very-low-temperature plasma process
studies have been carried out on microcrystalline silicon layers deposited on monocrystalline bases and the heterojunction devices fabricated using them. the mu c-si layers varied from a microcrystalline to epitaxial structure, depending on the substrate surface treatment and plasma-cvd conditions. the interface properties were primarily ..
ybco-bulk tunnel junctions with cadmium sulphide artificial barriers
tunnel junctions consisting of a ybco pellet electrode, a cadmium sulphide film as artificial barrier and an indium layer as counterelectrode have been fabricated. results concerning the effect of the ybco surface treatment and of the cadmium sulphide film thickness, both on the dv/di characteristics and the josephson effect occurrence ar..
josephson tunneling in ybco-nb bulk junctions
josephson junctions with nb sputtered film as counterelectrode have been realized on ybco pellets. the effect of the cleaning procedure of the ybco surface in the fabrication process is discussed. the i-v characteristic at 4.2 k shows a josephson current. a rough estimation of the magnetic penetration depth is obtained by the external mag..
a new method to study the fiber-matrix interface in unidirectional composite materials' application for carbon fiber-epoxy composites
describes a new test to study the fiber-matrix interface in unidirectional composites by dynamic shear testing along the fiber axis. this method, based on three scans with increased dynamic displacement amplitude, enables the recovery of mechanical properties and appearance of damage in the material to be studied for carbon fiber-epoxy un..