compositional study of ultrathin rapidly reoxidized nitrided oxides

ultrathin nitrided oxides (7.7 nm) were reoxidized for the first time by lamp-heated rapid thermal annealing in o/sub 2/ at 900-1150 degrees c for 15-600 s. compositions and residual hydrogen contents in various reoxidized nitrided oxides were studied by auger electron spectroscopy (aes) and secondary ion mass spectroscopy (sims), respect..

surface micromachining for microsensors and microactuators

micromechanical structures can be made by selectively etching sacrificial layers from a multilayer sandwich of patterned thin films. this paper reviews this technology, termed surface micromachining, with an emphasis on polysilicon microstructures micromechanical characteristics of thin-film microstructures critically depend on the averag..

oxide films formed on dry etched si surfaces

photo etching using a hg lamp with cl/sub 2/ gas was applied to si surface cleaning after sf/sub 6/ based gas rie. auger analysis showed that the surface layer damaged in sf/sub 6/ based gas rie was removed with this photo etching. mos diodes were fabricated on the rie etched surface and on the photo cleaned surface. mos c-v characteristi..

electrochemical pre-treatment of thin film platinum electrodes

thin film noble metal electrodes fabricated by the photolithographic process suffer from contamination of their surfaces with 'glue' metals which are used to promote adhesion to the insulating substrate. a simple electrochemical pre-treatment has been developed which removes the metal oxides from the surface ruthenium hexamine has been us..

the fabrication of josephson junctions on y-ba-cu-o thin films

the authors describe a successful fabrication of josephson tunnel junctions on ybco thin films based on a new surface stabilization technology. the authors found that the coating of the ybco surface with ag followed by low temperature annealing stabilizes the surface and that the film surface exhibits superconductivity. this phenomenon wa..

effect of surface treatment on the absorption spectra of lead-tin chalcogenides

reports the results of an investigation of the effect of different methods of treating the surface of samples on the absorption spectra of lead-tin telluride and lead-tin selenide methods are determined for fabricating the samples for which reliable information is obtained about their bulk properties

characteristics of schottky diodes on al/sub x/in/sub 1-x/as grown by mocvd

the effects of surface pretreatment and a variety of metallisation techniques on the characteristics of schottky diodes fabricated on al/sub x/in/sub 1-x/as grown by low-pressure and atmospheric-pressure mocvd have been investigated. barrier heights have been determined from i-v, c-v and i-t measurements and have been found to be in good ..

textile plant filters out control problems

springs industries' grace complex near lancaster sc is responsible for bleaching, dyeing and finishing apparel and sheeting fabrics. pneumatic relays/transducers are used to control such critical parameters as temperature in thermosol ovens and the flow of chemicals going to dye ranges. when the transducers malfunction, the process goes a..

interaction of low temperature plasma with poly(ethylene glycol terephthalate) fabrics

after treatment of the polyethylene glycol terephthalate (pet) fabrics in a plasma generated by a radio frequency glow discharge, the wettability and adhesion of pet fabrics were evidently improved these improvements would deteriorate as the washing frequency increased. under oxygen plasma, the pet fabrics were initiated, and then grafted..

the fabrication of epitaxial caf/sub 2//gaas(111) structures by molecular beam epitaxy

the deposition of monolayers of caf/sub 2/ on gaas(111) semiconductor substrates with the aid of molecular beam epitaxy is described, and the unit schematic design is shown. the experiment involved rest gas measurement before and during the deposition period, while the gaas wafer is introduced in the evacuated vessel after chemical cleani..