issues in dry cleaning of silicon wafers

gas phase cleaning of semiconductor substrates is emerging as a viable wafer preparation technology for advanced ic fabrication the author examines some of the technology drivers as well as some of the methods currently being explored

fabrication of high density magnetic recording media using metal particles

the feasibility of making a metal-particle-rigid disk has been demonstrated. to improve the quality of dispersion, a special type of surfactant and a pigment-pretreatment cycle were necessary. a unique combination of coating parameters has been selected to overcome the instability of magnetic coating. sharp transition (pw50=0.029 mu ) and..

control of the electrical properties of aln/thin-a-si/gaas mis diodes by gaas surface pretreatments

the influence of gaas surface stoichiometry was investigated on the electrical properties of aln/thin-a-si/gaas mis diodes which have an amorphous si interlayer. the structures were fabricated by an mocvd method with surface stoichiometry control by ash/sub 3/, h/sub 2/ and tmg (trimethylgallium) pretreatments. these procedures are expect..

plasma treatment of high t/sub c/ thin films for monolithic superconducting devices

the authors studied plasma treatment for application to high t/sub c/ superconducting devices. the electrical and physical properties of high t/sub c/ thin films can be modified by ar plasma treatment. the ar plasma irradiated films showed super-normal transition. the authors confirmed by x-ray photoelectron spectroscopy that ar plasma tr..

a new type of fiber optic biosensor based on the intrinsic fluorescence of immobilized flavorproteins

the authors describe a new biosensor for monitoring the concentration of enzyme glucose, lactate, and other substrates that are metabolized by an oxidation process. the method is based on the finding that enzymes having fad as a prosthetic group change their fluorescence during interaction with a substrate. typical enzymes that have been ..

fundamentals of enzyme substrate determinations by fiber optics spectroscopy

optodes and optical enzyme sensors are usually based on the determination of light reflected from the sensor head on an optical fiber. the fundamentals for the mathematical description of the corresponding processes are given by the kubelka-munk function, while in practice the lambert-beer-bouger's law is often applied the response of a p..

diamond turning achieves nanometer smoothness

single-point diamond turning machines are among the most precise lathes ever devised. these machines are designed to produce fine surface finishes on aspheric mirrors, ir optics, lens molds, high-energy laser mirrors, and other parts that require specularly reflecting surfaces accurate to a few tens of nanometers. to successfully design m..

resistance transitions of ion beam thinned yba/sub 2/cu/sub 3/o/sub 7/ films

milling with xenon ions directed at grazing angles onto the surfaces of c-axis oriented yba/sub 2/cu/sub 3/o/sub 7/ films is shown to give smooth films which superconduct at thicknesses approaching a lattice constant. the observed linear dependence of the room temperature sheet conductance with milling time allows a determination of the e..

a review of the use of al-alloy vacuum components for operation at 10/sup -3/ torr

an extremely high vacuum (xhv) chamber was fabricated and tested. the vacuum chamber of special surface finished (ex-process) aluminium alloy in oxygen and argon atmosphere. the chamber was assembled using tig welding in an argon atmosphere and by electron beam welding. the system was evacuated with a turbo-backed 300 1/s turbomolecular p..

the effect of surface treatment on the electrical properties of metal contacts to boron-doped homoepitaxial diamond film

both doped and undoped homoepitaxial diamond films were fabricated using microwave plasma-enhanced chemical vapor deposition (cvd). the conductivity of the diamond film is strongly affected by the surface treatment. in particular, exposure of film surface to a hydrogen plasma results in the formation of a conductive layer which can be use..