섬유

aluminum contact filling and planarization with pulsed laser

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 421
a simple and attractive method using a pulsed laser for metal planarization and contact filling with aluminum-based metallization has been demonstrated. with this method, mosfets have been fabricated with titanium salicide process and showed minimal device degradation as compared to controls
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