섬유

fabrication aspects of microwave devices, including ramp-type high-t/sub c/ josephson junctions and log-periodic antennas

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 423
the authors describe the development of high-t/sub c/ josephson junction devices for applications at millimeter wave frequencies. these devices consist of ramp type ybco/pbco/ybco josephson junctions that are equipped with a noble metal log-periodic antenna. growth conditions of all layers, as well as etching, clearing and annealing procedures are being optimized, to guarantee well-defined device properties. lowering the deposition temperature of the thick pbco layer strongly improved its isolating properties, which is of extreme importance for good reproducability of junction fabrication. special attention is being focused on the optimization of the contact of noble metal to ybco as well its adhesion to the substrate. best results are obtained using sputtered gold contacts, after a soft ar ion sputter clean treatment of the damaged ybco surface, followed bv anneal procedure
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