섬유
nanofabrication with a scanning tunneling microscope
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
382
nanometer-scale structures as small as 1 nm were fabricated on graphite surfaces using a scanning tunneling microscope in the presence of low-pressure (10/sup -4/ torr) trimethylaluminum. the studies were performed under controlled conditions of gas purity and gas pressure, allowing systematic measurements. the authors studied the voltage threshold and other features of the fabrication process as a function of the tip-surface biasing voltage and the tunneling current. the studies lead them to believe that the structures were formed by bombardment of the graphite surface by ions produced by electron-assisted field ionization localized in the region of the tunneling gap