섬유

nanofabrication with a scanning tunneling microscope

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 382
nanometer-scale structures as small as 1 nm were fabricated on graphite surfaces using a scanning tunneling microscope in the presence of low-pressure (10/sup -4/ torr) trimethylaluminum. the studies were performed under controlled conditions of gas purity and gas pressure, allowing systematic measurements. the authors studied the voltage threshold and other features of the fabrication process as a function of the tip-surface biasing voltage and the tunneling current. the studies lead them to believe that the structures were formed by bombardment of the graphite surface by ions produced by electron-assisted field ionization localized in the region of the tunneling gap