섬유

high-quality 100 aa sio/sub 2/ films fabricated by a new ecr microwave pecvd process

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 379
the authors produce high quality, very thin films with good electrical integrity using a low temperature ecr microwave pecvd technique. they consider the effects of energetic particles created in the plasma and of substrate surface treatment on the film characteristics
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