섬유

excimer laser thin metallic film patterning on polyvinylidene difluoride

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 379
tactile sensors and ultrasonic transducers based on the piezoelectric properties of polyvinylidene difluoride, pvf/sub 2/, usually take the form of thin 10-110 mu m polymer films coated on one or both sides with a metallic film. electrode patterns are usually fabricated by photolithography that requires a 90 degrees c baking process which may harm the piezoelectric properties of the pvf/sub 2/ film. the authors have developed an alternate method, based on direct patterning with a xecl laser, yielding complex patterns of lines as narrow as 20 mu m which are better than those fabricated by photolithography. the metallic film is ablated on both sides of the polymer while maintaining the intrinsic properties of the pvf/sub 2/. the ablation mechanism is investigated using transmission optical, scanning electron, and scanning acoustic microscope images. the performance of an ultrasonic transducer fabricated with this technique is described
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