섬유

improvement of the electrical properties of metal-sio/sub 2/-silicon capacitors by a preoxidation hf/ethanol clean of the substrate

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 392
the influence of a hf-ethanol dip as the last preoxidation cleaning step in the fabrication of metal-thin insulator-silicon capacitors is investigated. the experimental procedure and main advantages of this cleaning step for the electrical properties such as breakdown characteristics, i/v characteristics and interface state density are presented
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