섬유
laser-interferometer position feedback for precision machine tools
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
382
diamond turning of off-axis parabolic mirrors is used to provide high-quality turning and focusing optics for the los alamos scientific laboratory's laser-fusion research. these mirrors are fabricated at the oak ridge y-12 plant on a large machine tool that incorporates lasers, air bearings, and linear-motor slide-drives to meet the part specifications of 0.63 mum (25 muin.) on contour and 63 nm (2.5 muin.) on surface finish. the application of lasers to this machine and other precision machine tools is discussed