섬유
preparation of ggg substrates for epitaxy of magnetic garnets
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
370
deals with the preparation of magnetic epitaxial layers used in magnetic bubble memories. a technological process of fabricating garnet substrates from a massive gd/sub 3/ga/sub 5/o/sub 12/ monocrystal prepared by the czochralski method is described. the process has been developed with regard to its adaptability to the industrial si technology and includes the following stage' crystal orientation, cutting, sealing, grinding, polishing, cleaning and testing