섬유
description of a unique machine tool permitting achievement of <15-a rms diamond-turned surfaces
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
369
copper surfaces of revolution have been produced with a 12.3-aa rms surface finish and a contour accuracy of 75 nm. the cutting tool is programmed to move in 4 nm increments along two axes' one linear (x) axis and one circular (omega) axis exceptionally stiff and accurate control of the tool is possible with this 'omega-x' system. in conjunction with a thermally stabilized air bearing spindle and machine calibration equipment, the system permits a significant advance in the fabrication of optical-quality surfaces