섬유

diamond turning of silicon for optics applications

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 331
the goal of this study is to examine the feasibility of fabricating silicon optical surfaces by diamond turning. our approach has been to machine small slices of single crystal silicon using a range of process parameters similar to what has typically been employed with ductile materials. in this manner, a set of conditions has been bracketed which has yielded good values of surface finish as measured by stylus profilometry, and low levels of surface damage as indicated by scanning electron microscopy. the surfaces generated thus far have also yielded information of a fundamental nature which relates to the turning of brittle materials in general. recommendations for further work are suggested to maximize the material removal rate without compromising surface quality, to quantify any tendency to generate figure errors, and determine what problems are involved in scaling the process to larger surfaces. (era citation 13:007638)
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