섬유

charged-particle coating

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 306
advanced target designs require thicker (approx. 300 mu m) coatings and better surface finishes that can be produced with current coating techniques. an advanced coating technique is proposed to provide maximum control of the coating flux and optimum manipulation of the shell during processing. in this scheme a small beam of ions or particles of known incident energy are collided with a levitated spherical mandrel. precise control of the incident energy and angle of the deposition flux optimizes the control of the coating morphology while controlled rotation and noncontact support of the shell minimizes the possibility of particulate or damage generated defects. almost infinite variability of the incident energy and material in this process provides increased flexibility of the target designs which can be physically realized. (era citation 06:019918)
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