섬유

adaptation of ion beam technology to microfabrication of solid state devices and transducers

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 317
a number of areas were investigated to determine the potential uses of ion beam techniques in the construction of solid state devices and transducers and the packaging of implantable electronics for biomedical applications. the five areas investigated during the past year were: (1) diode-like devices fabricated on textured silicon; (2) a photolithographic technique for patterning ion beam sputtered pvc (polyvinyl chloride); (3) use of sputtered teflon as a protective coating for implantable pressure sensors; (4) the sputtering of macor to seal implantable hybrid circuits; and (5) the use of sputtered teflon to immobilize enzymes
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