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주요사업
- 시험분석
- 품질검사
- 제품안전·인증·검증
-
제품안전(KC)
- 연구개발
- 기업지원
기술정보
섬유
characteristics of thick non-planar sio sub 2 coatings
- 출판일1999.03
- 저자
- 서지사항
- 등록일 2016.11.02
- 조회수 326
we have successfully developed a new process for making strong, smooth, thick sio sub 2 films on hemispherical kovar mandrels of various sizes designed for multishell laser fusion targets. the surface finish obtainable with a 13 mu m thick sio sub 3 coating on a 260 mu m dia. mandrel is approximately 30 nm peak-to-peak, with a few defects of roughly 0.3 mu m deep. the rf magnetron sputtered sio sub 2 films were dense and crystalline. (era citation 04:048251)
