섬유

growth of passivating uv/ozone oxides on inp. correlations between chemical composition and interfacial electrical properties

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 292
native oxides grown on inp by uv/ozone oxidation are studied as a function of various experimental conditions. they are compared to standard inpo//4 thermal oxides and to in(po//3)//3 anodic oxides the chemical composition of these oxides is investigated by x-ray photoelectron spectroscopy. the atomic composition of the uv oxides varies from inp//0//.//3o//2//.//2//5 to inp//0//.//8o//3//.//5 as a function of the growth conditions. it is shown that these phosphates have a well-defined local order. the electrical properties of the oxide-inp interfaces are studied using schottky diode barrier (i-v) measurements on metal/thin-oxide/semiconductor (mis) structures. a correlation between chemical composition and interfacial electrical properties is established. (author abstract) 26 refs
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