섬유

laser-interferometer position feedback for precision machine tools

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 262
diamond turning of off-axis parabolic mirrors to provide high-quality turning and focusing optics for the los alamos scientific laboratory's laser-fusion research. these mirrors are fabricated on a large machine tool that incorporates lasers, air bearings, and linear-motor slide-drives to meet the part specifications of 0. 63 $mu$ m (25 $mu$ in. ) on contour and 63 nm (2. 5 $mu$ in. ) on surface finish. this report discusses the application of lasers to this machine and other precision machine tools
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