비의류제품

improved inhibit patterning of yba/sub 2/cu/sub 3/o/sub 7/ thin films

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 437
the authors present an improved reaction patterning technique to fabricate very stable thin film devices of ybacuo on various substrates. their approach includes in situ patterning and completely avoids the contact between ybacuo superconductor and chemical or physical etchants. very thin, high quality ybacuo structures are grown on ridges or in trenches and in situ protected by passivating layers, demonstrating excellent long term stability
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