비의류제품
plasma treatment of high t/sub c/ thin films for monolithic superconducting devices
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
445
the authors studied plasma treatment for application to high t/sub c/ superconducting devices. the electrical and physical properties of high t/sub c/ thin films can be modified by ar plasma treatment. the ar plasma irradiated films showed super-normal transition. the authors confirmed by x-ray photoelectron spectroscopy that ar plasma treatment changed the cu valence of high t/sub c/ films significantly. they also tried to fabricate super-normal-super (s-n-s) structures from high t/sub c/ thin films using selective ar plasma treatment