비의류제품

electrical contact studies of chemically treated yba/sub 2/cu/sub 3/o/sub 7-x/ surfaces

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 441
results on electrical characterization of high t/sub c/ thin film surfaces modified by different surface treatments are presented. in particular, this work examines the effect of a br/ethanol chemical etch, which has previously been shown to remove surface contamination while preserving the cu(+2) oxidation state electrical measurements of yba/sub 2/cu/sub 3/o/sub 7-x//au/nb contact structures fabricated using polycrystalline, post-annealed yba/sub 2/cu/sub 3/o/sub 7-x/ films with br-etched surfaces show improvements of approximately one to two orders of magnitude in contact current densities and resistivities (resistance-area products) relative to unetched contacts. the br-etch process has produced 10*10 mu m/sup 2/ contacts with contact current densities greater than 400 a/cm/sup 2/ and r/sub n/a products as low as 4*10/sup -7/ omega -cm/sup 2/