비의류제품

silicon micromachining for microsensors and microactuators

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 421
system integration is often limited by the incompatibility of technologies used for the fabrication of signal processors and signal transducers like sensors and actuators. most of the problems related to conventional transducers such as miniaturization, performance or price can be overcome by the use of silicon as a mechanical material and the use of highly developed ic technologies for their fabrication. therefore, a rapidly increasing demand for micromachined silicon transducers can be observed. the multidisciplinary use of silicon for mechanical and electronic functions on the same chip leads to completely new transducer and system concepts. this review describes the fabrication processes commonly used for silicon micromachining. the potential of this technology is illustrated by various examples of micromechanical transducers
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