비의류제품

surface micromachining for microsensors and microactuators

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 449
micromechanical structures can be made by selectively etching sacrificial layers from a multilayer sandwich of patterned thin films. this paper reviews this technology, termed surface micromachining, with an emphasis on polysilicon microstructures micromechanical characteristics of thin-film microstructures critically depend on the average residual stress in the film, as well as on the stress variation in the direction of deposition. the stress in low-pressure chemical vapor deposition polysilicon varies with deposition temperature, doping, and annealing cycles applications of surface micromachining to fabricate beams, plates, sealed cavities, and linear and rotary bearings are discussed
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