비의류제품

electronic applications of molecular films

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 456
extremely thin films, a few molecules in thickness, offer many potential applications for the fabrication of new types of semiconductor devices. the author discusses the deposition of very uniform thin films by the langmuir-blodgett technique. the application of the film in very high resolution resists developed for electron beam lithography is covered, together with the formation of thin passivating and insulating layers in semiconductor device fabrication. in integrated optical devices, waveguides can be fabricated by sequential stacking of monomolecular layers. there is also a growing interest in the use of langmuir-blodgett films for the fabrication of chemfet devices which detect the presence of specific molecules, including gases, and even enzymes and other biologically important molecules
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