비의류제품

investigation of passivation films for a-si'h photoreceptors ii. surface modification of a-sic'h films by cf/sub 4/ plasma treatment

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 468
the contact angle of a water drop on a-sic'h films increases up to 95 degrees after the cf/sub 4/ plasma treatment. hydrophobic inorganic layers containing c-c (or ch/sub 2/) and c-fn(n=1-3) bonds are formed on the surface. a new a-si'h photoreceptor with the cf/sub 4/ plasma treated a-sic'h films for the surface passivation layer was fabricated. there is little change in the photosensitivity through the surface potential decrease by 20 percent after the treatment
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