비의류제품

fabrication and testing of a micromachined shear sensor

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 458
a surface micromachine floating-element shear-stress sensor intended for use in turbulence research is described. a package technology has been developed and the sensor has been calibrated in laminar flow. results of the measurements are in good agreement with an electromechanical model of the response