비의류제품
fabrication and testing of a micromachined shear sensor
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
458
a surface micromachine floating-element shear-stress sensor intended for use in turbulence research is described. a package technology has been developed and the sensor has been calibrated in laminar flow. results of the measurements are in good agreement with an electromechanical model of the response