비의류제품

uv-ozone cleaning of gaas (100) surfaces for device applications

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 502
gaas (100) substrates were subjected to uv-ozone, wet chemical, and thermal treatments prior to deposition of ni contact structures. the use of uv-ozone showed marked improvement in the electrical characteristics compared to the wet chemical and thermal treatments alone. the major effect of uv-ozone is the nondestructive removal of carbonous contaminants. results of c-v and i-v barrier height measurements on ni contact structures fabricated on the treated surfaces are presented
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