비의류제품

an apparatus for batch fabrication of micromechanical elements by ion beam machining

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 480
an apparatus has been constructed for ion beam milling of micromechanical structures. a 3 cm kaufman type source is used to provide argon ion current densities and energies of up to 25 ma/cm/sup 2/ and 1.5 kv, respectively. stencil masks prepared by chemical milling are used to produce an array of microbeams allowing batch fabrication of micromechanical elements by scanning the mask or workpiece. algorithms have been developed for computer control of workpiece position, orientation, and rotation. computer control of beam current and energy has also been implemented. a database of sputtering yields and redeposition rates allows optimum operating conditions to be selected for a given application. investigations include micromachining of refractory metals, milling of slots, holes, and grooves, and surface texturing, polishing, and figuring micromechanical structures
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