비의류제품

high-temperature thermal nitridation and low-temperature electron-beam-enhanced nitridation of sio/sub 2/ thin films

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 471
surface nitridation of very thin sio/sub 2/ films ( approximately=13 nm) is achieved at low ammonia pressures by thermal activation (900 degrees c
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