비의류제품

ion beam machining of micromechanical structures

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 472
the needs of high precision engineering currently call for dimensional tolerances of the order of 0.1 mu m and surface roughness of order 0.01 mu m, often in hard, brittle materials or materials of relatively poor machinability. the development of argon ion beam machining for milling, drilling and turning or lathing is reported as a means of satisfying these requirements. highly controllable material removal is achieved for the fabrication of micromechanical structures, profiling of surfaces and fine surface finishing. surface evolution at submicron precision is demonstrated, with particular reference to the production of both circular and non-circular sections in an 'ion beam lathe'
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