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adaptability of al-alloy ultrahigh-vacuum system of semiconductor fabrication

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 473
it is shown that an ultrahigh vacuum system consisting of aluminium alloy is a powerful tool for the fabrication of semiconductor devices. good characteristics of this system include short pumping time, lower baking temperature and low out-gassing rate, which are accomplished by an adequate surface treatment of the aluminium alloy
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