비의류제품

monolithic multi-function enfet biosensors

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 471
monolithically integrated enzyme fets (enfets) for urea and glucose detections have been successfully realized using an sos wafer and a selective enzyme immobilization technique. isfets were fabricated on a sos substrate, and urease and glucose oxidase were immobilized on the silicon nitride gate insulator using photosensitive pva films. the pva films including enzyme molecules, were formed on the gate regions by either using a spin coating method or injecting the pva-enzyme solutions with a microsyringe after exposure to uv light, the films became insoluble, and enzymes were entrapped in the films. the method is suitable for the selective immobilization of different enzymes on separate gate regions