비의류제품
thick films fabricated by the sol-gel method for microionic and microelectronic devices
- 출판일1999.03
- 저자
- 서지사항
- 등록일
2016.11.02
- 조회수
470
for microionic applications, superionic conductors have been fabricated in the form of thick films, using silk-screen printable powders. na/sub 3/zr/sub 2/si/sub 2/po/sub 12/, na/sub 3.1/zr/sub 1.55/si/sub 2.3/p/sub 0.7/o/sub 11/, li/sub 0.8/zr/sub 1.8/ta/sub 0.2/(po/sub 4/)/sub 3/, lialsio/sub 4/ and lialsi/sub 2/o/sub 6/ compositions are synthesized by a sol-gel process involving hydrolysis-polycondensation reactions of metal-organic alcoholic solutions. the layers, about 50 mum in thickness, are achieved by successive depositions and sinterings (950 degreesc-1050 degreesc) onto alumina substrates. film conductivity is determined by the complex impedance method. values reach those obtained with ceramics