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pressure transducers employing the piezoresistive effect twenty years of research on their industrial applications

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 491
stresses the great advances made possible in transducer techniques by solid state technologies and mentions how the first silicon strain gauges were introduced in 1960. the achievements of research and development on pressure sensors employing the piezoresistive effect are illustrated by comparing the earliest pressure sensors employing diaphragms and bourdon tubes, and the sensors which provided an electrical signal (including strain gauges of various types) with the capacities and characteristics of solid state pressure gauges, which are used in aircraft, in medicine, in the chemical industry and for laboratory research. the manufacturing techniques which are similar to those for integrated circuits are discussed, pointing out possible future use of thick film resistors, which can be produced by silk screen printing and are little effected by temperature
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