비의류제품

figure and finish of grazing incidence mirrors

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 511
great improvement has been made in the past several years in the quality of optical components used in synchrotron radiation (sr) beamlines. most of this progress has been the result of vastly improved metrology techniques and instrumentation permitting rapid and accurate measurement of the surface finish and figure on grazing incidence optics. a significant theoretical effort has linked the actual performance of components used as x-ray wavelengths to their topological properties as measured by surface profiling instruments next-generation advanced light sources will require optical components and systems to have sub-arc second surface figure tolerances. this paper will explore the consequences of these requirements in terms of manufacturing tolerances to see if the present manufacturing state-of-the-art is capable of producing the required surfaces. 15 refs., 14 figs., 2 tabs