thin multilayered films consisting of tantalum nitride (ta sub 2 n), titanium, palladium, and gold are used at sandia to fabricate hybrid microcircuits. from these stock multilayered composites, various circuits can be selectively etched and patterned to provide conductors and two levels of resistor patterns. the tantalum nitride is used to form resistor structures having values ranging from about 20 to 50,000 ohms. in order to provide resistors having values of about 1 to 4 ohms, the palladium, with its underlying titanium and ta sub 2 n layers, is used; these were designated as ti-pd resistors low resistivity tuned strip lines, for example, have this need present hmc technology typically limits the fabrication precision of thin film resistors to accuracies of 20 or 30. laser trimming is typically used to adjust out-of-tolerance resistors, however, in the case of strip line resistor applications this introduces undesirable variations in the impedance. we have completed a study of the use of an electrochemical probe which can be used to selectively deposit gold or, alternatively, remove palladium from the surface of the palladium composite film resistors described above. this permits resistor adjustment to either higher or lower values and does not produce discontinuities which occur with laser trimming. the process is similar in its result to that observed in the electrochemical or anodic trimming of ta sub 2 n resistors and is used to achieve practical tolerances of about 5 in ti-pd resistors. studies describing accelerated life aging, temperature coefficient of resista