비의류제품

wafer-scale laser pantography. vi. direct-write interconnection of vlsi gate arrays

  • 출판일1999.03
  • 저자
  • 서지사항
  • 등록일 2016.11.02
  • 조회수 536
general principles of laser direct-write deposition processes are reviewed. device interconnection of cmos gate arrays by means of computer-controlled, laser-induced thermochemical surface reactions is described. interconnection quality parameters are related, and processing rate considerations are discussed. (era citation 09: 033924)
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