the fabrication process and characteristics of monolithically integrated urea and glucose fets are described. first, isfets were fabricated on a sos substrate and a photosensitive dry film was coated onto it to form micropools over the isfet gates. then mixtures of photosensitive pva and enzyme solutions were injected into these pools using microsyringes. after exposure to uv light, an insoluble membrane with enzyme entrapped in it was formed. the proposed fabrication process was considered to be compatible with ic technology. the fabrication process can be used for the preparation of multifunctional and one-chip biosensors with various others pairs of immobilized enzymes